USING EMULATION TO VALIDATE A CLUSTER TOOL SIMULATION MODEL H . Todd
نویسندگان
چکیده
Getting the most productivity per square foot of clean room space is a common goal for todays semiconductor fabs. Cluster tool throughput is an important factor in a tools productivity index. Maximizing and accurately predicting throughput is a high priority in the cluster tool market. This paper presents a flexible and sufficiently accurate cluster tool simulation model. The simulation model can run as an emulator, using the real-world cluster tool scheduler (CTS), or as a stand-alone simulation model using a rule-based scheduler. The process of validating the stand-alone simulation rule-based scheduler against the actual cluster tool scheduler is discussed. A comparison between the two schedulers is detailed. Finally, the results, benefits, and limitations of the simulation model are presented.
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